Fabry-Perot İnterferometre Tabanlı Sensörlerde Mesa Boyutlarının MEMS Diyaframlar Üzerine Etkisi

In this study, the effects of mesa dimensions on sensor response in diaphragm-based Fabry-Perot fiber optic sensors (FOSs) were investigated detail. Mesa diaphragms, also called center-embossed have been discussed sufficiently literature, but effect thickness performance has not Moreover, there is no precise analytical solution for such diaphragms. For reason, diaphragms with different thicknesses and radii selected, deflection frequency responses diaphragm according to applied acoustic pressure analyzed using ANSYS software, depending whether thinner or thicker than diaphragm. If smaller diaphragm, center changes drastically. However, if two times greater significant change results. Similarly, sensor’s drastically increasing radius. cases where larger thickness, less. According results, should be considered when designing a FOS.